By Kash L. Mittal
This ebook records the court cases of the second one overseas Symposium on Adhesion size of movies and Coatings, held in Newark, NJ, October 25-27, 1999. This quantity comprises 20 papers, that have all been conscientiously peer reviewed and certainly converted ahead of inclusion. the themes contain: size and research of interface adhesion; relative adhesion size for skinny movie constructions; adhesion checking out of not easy coatings by means of quite a few concepts; dimension of interfacial fracture power in multifilm functions; laser caused decohesion spectroscopy (LIDS) for measuring adhesion; pulsed laser strategy for evaluation of adhesion; blade adhesion try; JKR adhesion attempt; coefficient of thermal enlargement size; and residual stresses in diamond motion pictures.
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Extra info for Adhesion Measurement of Films and Coatings, Volume 2
XPS C l s data for samples 3, 2A, and 1A are compared with C l s due to ordinarily observed ambient contamination on a Si-wafer surface in Figure 16. Relative adhesion measurement for thin j l m microelectronic structures SiNlCu B) With FeCl/ SiNlCu With FeCI, epoxy side C I S . 37 t . \ r .. II * I b , I\ I . ,’ ’. O eV Figure 16. Comparison of C l s data of epoxy surface (A), SiN/Cu + FeC13; epoxy side of the failure (B), SiN/Cu no FeC1,; epoxy side of the failure (C), and ambient contamination (D).
57. H. S. Kim, I d . J. Solids Structures, 30, 1789 (1993). 58. P. Adhesion Sci. , 7, 941 (1993). 59. P. L. W. 147, VSP, Utrecht, The Netherlands (1997). 60. O. D Thesis, Massachusetts Institute of Technology (1995). Relative adhesion measurement for thin film microelectronic structures 47 61. L. D Thesis, University of Massachusetts, Amherst (1988). 62. L. O. H. 503, Plenum, New York (1980). 63. C. Feger, Personal Communication (1999). 64. G. D. S. , 3, 1043 (1998). Adhesion Measurement of Films and Coatings, Vol.
A schematic of MELT specimen with release layer for initial crack definition. The top view of the sample after successful dicing along the middle of the 5mm wide release layer strips is shown in Figure 18. This type of sample fulfills the steady-state requirement for crack propagation (pre-crack length should be -5 x film thickness) . The rest of the paper will focus on low-k ILD/Si02 MELT results (Modern Metalcraft Cryostage MELT equipment) and locus of failure characterization. 75ym. The epoxy thickness was on the order of 200pm.
Adhesion Measurement of Films and Coatings, Volume 2 by Kash L. Mittal